Celerity is a world leader in the design and production of high performance gas and liquid delivery process modules and critical instruments that are integral to semiconductor manufacturing and other related industries requiring high precision process control.
Liquid Flow Controller
Ratio Flow Splitter Module
ConSensor ModuleNEWS
TECHNOLOGIES
MultiFlo® technology is an N2-calibrated, gas and range configurable flow control solution.
PTI technology utilizes a dual sensor controller to compensate for yield-impacting pressure transients.
Step® technology enables fast setpoint control response through an optimize sensor drive.
InFlo™ technology enables precise liquid flow control.
Spectrym™ technology enables concentration specific monitoring of chemicals.
Particle characterization technology ensures process integrity by tracking particle size and distribution.