GAS DELIVERY

Celerity is renowned for its design and manufacturing of gas delivery modules that measure and control the delivery of high-purity process gases for semiconductor equipment with great precision. We work with customers to understand their objectives, then custom design a solution that meets their needs in terms of performance, packaging, and cost of ownership. We also collaborate on special projects to develop additional technologies or combinations of technologies into a single package for solving application specific problems. In all cases, we manage the entire supply chain behind the manufactured solution, assuring its quality and predictability. We provide the following types of gas delivery modules: PTI Module, Rate-of-Rise Module, and Ratio Flow Splitter Module.