PRODUCTS
TEMPERATURE CONTROL
Celerity custom designs, manufactures and supplies temperature sensing instruments and thermal control systems under the brand name Marchi™. Our main areas of activity include the following: temperature measurement and thermal control systems.
Temperature Sensing Instruments
Celerity is a recognized leader for high-accuracy temperature sensing solutions for OEMs, who use our products for testing, monitoring, and controlling temperature levels during the wafer-manufacturing process. In collaboration with OEMs during their initial equipment research and development phase, we custom configurations and packaging methods to incorporate our specialty temperature sensors and heaters into semiconductor manufacturing equipment.
Celerity specializes in difficult installations that operate inside the tool, measuring the process temperature at the wafer. We manufacture industry-standard thermocouple types and any required outboard mechanisms from raw materials. We provide multiple-point sensors with two or more thermocouples housed inside the same sheath for built-in redundancy and safety systems. In addition to engineering the thermocouple itself, we understand how to install it in circumstances that require a vacuum seal or special shielding to protect the thermocouple from a radio frequency environment. Celerity's application engineers are especially experienced at developing custom mounting mechanisms for thermocouples, often taking a reverse engineering approach from OEM schematics to accommodate space constraints.
Benefits include:
- Field-proven in adverse environments
- Multiple-point sensors for built-in redundancy and safety
- Custom designed in all ANSI types
Thermal Control Systems
Celerity's thermal control systems include gas line and other process heaters and control systems. We develop customized products in all shapes, sizes, operating voltages, and wattage ratings for installation inside the gas panel and from the gas panel to the tool chamber. Our specialty is silicone rubber-backed heaters for heating gas-line weldments, valves, ampoules, and other piping components. Custom designed to accommodate the crowded gas panel interface, our gas line heaters surpass the highest safety ratings.
Because our heaters are integrated with the gas weldment we facilitate good contact, even wrapping around corners and elbows to avoid cold spots that can constrict gas flow. Customers get excellent heat transfer, longer heater life and better reliability. We also offer self-regulating systems in which no external temperature controller is needed, as well as mineral-insulated cable heaters for high temperature applications. Our engineers work closely with customers to design complete thermal control solutions that seamlessly integrate our technologies with their requirements.
Modular heater benefits include:
- Excellent heat transfer and temperature uniformity
- Self limited at predetermined temperatures
- Compliant with SEMI S-0200 requirements
Gas-line heater benefits include:
- Efficient, high quality, and reliable
- Eliminates cold spots
- Heats entire piping system
- Reduces cost of ownership
- Compliant with SEMI S-0200 requirements