LIQUID DELIVERY

As semiconductor manufacturers adopt new and more complex liquid chemical processes, they require improvements in the control of liquid delivery. These processes typically require blending from several different liquid caustic and solvent chemicals - with each chemical delivered in precise quantities and concentrations at a variety of temperatures at their point-of-use. Celerity's engineering group provides liquid delivery modules for both OEMs and semiconductor manufacturers. Our OEM solutions are point-of-use modules, whereas our semiconductor manufacturer solutions are bulk delivery, fab-wide solutions. Because of the evolutionary nature of semiconductor manufacturing processes, we take an application-oriented approach to create exact solutions for specific challenges, supported by state-of-the-art research and development efforts.

Specific to CMP, our solutions improve semiconductor manufacturers' process performance by providing uniform, copper and low-k dielectric material removal with low dishing, erosion and surface defects. Through our laboratory testing of slurries, chemicals, and components from leading manufacturers, we have developed expertise in controlling properties, characterizing assays, and developing next generation solutions. Celerity maintains a research and development department that can provide added value to the semiconductor manufacturing process. From basic testing and fundamental R&D to design consulting and thorough system validation, Celerity can assist in solutions. We operate a facility dedicated to pilot scale process development and testing, as well as an analytical lab and a separate facility for reliability evaluations. All data is managed electronically.

We also embed our core technologies in flow control, concentration management, and particle characterization as necessary to fit the tool set and its space constraints. These improvements reflect our engineering expertise and ability to work with customer specifications, design a custom solution that satisfies requirements in one package, and take the resulting design from prototype to production. From the sub-fab to the wafer, we provide the following liquid delivery modules and equipment: OEM point-of-use modules, chemical blending and distribution equipment, slurry blending and distribution equipment - marketed under the Mega Systems™ brand, and vapor delivery systems.

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