SUPPORT

Service

  • On-Site Applications & Technical Support
  • 7 days/week, 24 hours/day
  • Spares management and logistics
  • System support
  • Flow control support
  • Project management
  • Training programs & technical publications

System Support

  • Diagnostics & troubleshooting
  • Leak detection
  • Facility & tool interface maintenance
  • Micro-contamination analysis

Flow Control Support

  • Calibration & verification
  • Repair & replacement
  • Advanced diagnostics

Spares Management $ Logistics

  • Global spares management
  • Repair/exchange programs
  • On-site spares management

Project Management

  • Documentation management
  • Project engineering
  • Project tracking
  • Training
  • Applications
  • Product specific
  • Customer specific

Technical/Applications Support

  • Gas delivery systems
  • Flow controllers
  • Chemical delivery systems
  • Thermal measurement and control systems
  • Process characterization
  • Process upgrades
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