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COMPANY PROFILE

Celerity is a world leader in the design and production of high performance gas and liquid delivery process modules and critical instruments that are integral to semiconductor manufacturing and other related products requiring high precision process control.

With vertically integrated solutions and global resources, Celerity is uniquely positioned to provide the most compelling set of products and services with respect to quality, flexibility, cycle time, cost of ownership, and accelerated speed to market.

Celerity employs over 80 engineers and scientists engaged in all aspects of technology and product development. Our technology solutions result from a strong core competency in fluid dynamics, thermal heat transfer, and physical chemistry. This expertise is accentuated in technologies that require high-precision mechanical engineering and thermal and magnetic modeling, such as MultiFlo™, PTI, and Step™ found in our gas delivery modules and InFlo™, Spectrym™, and particle characterization technologies used in liquid delivery modules.

Celerity maintains ISO 9001 certified clean room manufacturing facilities globally and a team of over 50 applications and service engineers to provide 24/7 customer support. Through a firm commitment to continuous improvement, Celerity has received a number of quality awards and is recognized by key customers for outstanding quality performance and business processes.

Principal Industries Served

• Semiconductor
• Biopharmaceutical
• Aerospace
• Petrochemical
• Flat panel displays
• Magnetic and optical storage devices
• Micro-electro mechanical systems (MEMS)
• CMOS sensors
• Fiber optic cables

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Principal Products

Gas Delivery:

• Gas Delivery Modules
• Gas Interface Boxes
• Gas Sticks
• Purge Panels
• Rate-of-Rise Modules
• Ratio Flow Splitters
• Valve Manifold Boxes

Liquid Blending and Delivery:

• Analytical and Metrology Equipment
• Bottle, Metrology, Utility Carts
• Bulk Chemical Blending Equipment
• Bulk Chemical Distribution Equipment
• Bulk Slurry Blending Equipment
• OEM Point-of-Use Modules
• Slurry Filtration Equipment
• Valve Manifold Boxes
• Vapor Delivery Systems

Critical Instruments and Control Systems:

• Gas Line Heaters
• Kapton™ Heaters
• Gas Flow Controllers
• Gas Flow Meters
• Pressure Controllers
• Liquid Flow Controllers
• Silicone Rubber Heaters
• Temperature Control Panels
• Thermocouples

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