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Modular Gas Delivery System Boosts Efficiency of Semiconductor Industry

April 4, 2000 - Kinetics Fluid Systems has launched a new generation of modular surface-mount gas system technology which delivers dramatic improvements at the assembly and maintenance phases of semiconductor process tooling.

Called K1, the product breaks new ground in gas delivery technology by means of substrate modules that connect in a tongue and groove fashion, and bolt together to interconnect flow components without the need of special tooling. This allows OEM tool makers and semiconductor manufacturers to build custom gas sticks extremely rapidly, and to break them down for process upgrades or maintenance with equal ease - at a cost competitive with welded gas systems.

"Kinetics views Year 2000 as a turning point for modular surface-mount gas systems. The technology is moving from evaluation and qualification into volume production", says Don Firkins, Managing Director, Kinetics Fluid Systems, European Operations. "Modular systems are cost-competitive with conventional welded systems. The installed base is proving that it is viable, with many benefits at low risk. OEMs are beginning to standardise on the approach, and we expect to see complete modular-based process sections based in new fabs built this year."

The complete flexibility of mounting and interconnection afforded by K1 translates into faster start-up for fabrication facilities. Thanks to the elimination of welds and easy reconfiguration to handle last-minute changes, lead-times are typically reduced by over 50%, to between 3 and 4 weeks, compared with 10-12 weeks for conventional gas systems.

Kinetics Fluid Systems has used its unrivalled experience gained with three previous families of modular substrates to optimise the physical characteristics of K1. Weighing typically 30% less than first-generation modular systems, and requiring just 50% of the space of a conventional welded gas stick, K1 actively supports the construction of larger gas systems. This is expected to be a major asset for new-generation 300mm semiconductor process lines, which might require gas systems with as many as 15 sticks.

The K1 offers other substantial advantages over earlier modular gas systems. These include utilising the active components to bridge the modules - thereby eliminating assembly seals and fasteners - and a planar structure which allows all components to be installed or removed from one direction using a single wrench.

The substrate modules feature dowel pins for self-alignment, graphics to help users visualise the gas flow path, and industry-standard C-seals compliant with SEMI PR 3.1 - for open compatibility with valves, regulators, filters, transducers and mass flow controllers from all major manufacturers. K1 has undergone extensive performance and reliability testing. Leak integrity is specified at 10-9atm-cc/sec (He), and severe environmental tests have demonstrated integrity after vibration between 3Hz to 300MHz, or after shocks of 75G - compared to failures at less than 40G for conventional systems.

K1 gas systems are configured from a range of 13 standard stainless steel substrate modules. These provide the flowpath and physical mounting for all the components used on semiconductor gas sticks. Any type of welded gas delivery system configuration may be emulated.

Background information:

KINETICS Fluid Systems, a business unit of Kinetics, incorporating Unit Instruments, is a leading manufacturer of mass flow controllers and gas delivery systems for the semiconductor and electronics markets. The company maintains support and service centres throughout North America, Europe, and the Pacific Rim.KINETICS is one of the largest providers of high-purity and mechanical process systems in the world. The company manufactures and installs water, chemical, and gas handling systems that are critical to the microelectronics, biotechnology, and pharmaceutical industries. KINETICS offers state-of-the-art turnkey solutions, providing a single source of accountability for fast-track projects.KINETICS, part of United States Filter Corporation (NYSE/USF), is the leading global provider of commercial, industrial, municipal and residential water and wastewater treatment systems, products and services.