PRODUCTS
CHEMICAL BLENDING AND DISTRIBUTION SYSTEMS
Celerity offers a complete range of equipment and system solutions for accurate blending and/or distribution of high purity chemicals and solvents for semiconductor fabrication, and applications in other industries. As a leading chemical blending and distribution system supplier, Celerity offers a full line of equipment to address the unique requirements of device manufacturers. Our systems are designed and manufactured for high reliability and purity, safe operation, low cost-of-ownership, and flexibility for different requirements and applications, custom designed to fit your unique needs.
MegaBlend?
MegaBlend series of products provide accurate and repeatable blending of high purity chemicals and solvents for a variety of applications. Most common applications include blending of one or two chemicals and DI water. Flexibility in recipe management and optional instrumentation for qualification and monitoring of blend quality are some of the key features.
MegaBlend models include:
- MegaBlend 1100DT
- MegaBlend 1100PV
- MegaBlend 1100SF
- MegaBlend 2500SF
- MegaBlend with MegaShot Process Technology
MegaPure?
MegaPure series of products are for distribution of high purity chemicals and solvents from small-scale local applications to plant/fab wide large-scale bulk use. Features and capabilities differentiate models offered.
MegaPure models include:
- MegaPure 25
- MegaPure 50
- MegaPure 100
- MegaPure 100SS
- MegaPure 500SF
- MegaPure 4200SF
DynaBlend?
DynaBlend is a precision in-line dynamic chemical blending system with compact and modular design architecture. Suitable for many chemical blending applications.
topTECHNOLOGIES
Celerity proprietary technologies for liquid process modules.
InFlo™ technology enables precise liquid flow control.
Spectrym™ technology enables concentration specific monitoring of chemicals.
Particle characterization technology ensures process integrity by tracking particle size and distribution.