PRODUCTS
LIQUID DELIVERY MODULES
OEM Point-of-Use Modules
Our point-of-use liquid modules use advanced technologies to achieve the process specifications for distribution, composition and particle size. We also provide chemical analysis and titration modules that analyze and replenish vital chemistries in order to maintain and extend the life of a chemical batch used for polishing, cleaning or plating processes. Our liquid blending, delivery and wet-cleaning modules are designed to meet OEMs' customer-specific process requirements.
TECHNOLOGIES
Celerity proprietary technologies for liquid process modules.
InFlo™ technology enables precise liquid flow control.
Spectrym™ technology enables concentration specific monitoring of chemicals.
Particle characterization technology ensures process integrity by tracking particle size and distribution.