PRODUCTS
LIQUID FLOW CONTROLLERS
Ultra High Purity (UHP) Liquid Flow Products
InFlo Controller model IC780
Celerity’s InFlo controllers meet the needs of your most demanding wet chemical processes. Our next generation liquid flow capabilities support point-of-use recipe management and dynamic blending applications. Closed-loop control provides fast recovery time for setpoint changes and fluctuation in facility pressure. Non-intrusive ultrasonic sensors and flow through design eliminate particulate contribution from the component.
Leveraging our expertise in fluid delivery and blending cultivated through our Mega product line, Celerity delivers an integrated solution for your critical process applications.
Celerity InFlo controllers utilize ultrasonic sensors and proprietary algorithms to provide highly accurate and repeatable flows. Non-intrusive ultrasonic sensors prevent detrimental impact on delivered fluids (agglomeration of slurry and breakdown of sensitive chemicals due to shear force). Celerity’s unique software takes into account the dual phase nature of slurry and manages anomalies, including bubbles.
Benefits and Features:
- Provides solution for problematic peristaltic pumps
- Optimizes chemical consumption, improving process
reproducibility - Repeatable controlled dispense rates minimizes waste
- Reduces wafer defects attributed to current dispensing methods
TECHNOLOGIES
Celerity proprietary technologies for liquid process modules.
InFlo™ technology enables precise liquid flow control.
Spectrym™ technology enables concentration specific monitoring of chemicals.
Particle characterization technology ensures process integrity by tracking particle size and distribution.