PRODUCTS
GAS FLOW CONTROLLERS
Celerity's gas flow controllers incorporate Celerity's core MultiFlo® and Step® technologies, which enable them to meet tough process challenges for next generation applications. Celerity flow controllers are specified more than any other supplier and are preferred for their field proven accuracy, repeatability, reliability, flow stability and configurability. Celerity guarantees performance and operating specifications by means of our exclusive CrossChek™ calibration method, which insures statistical confidence for stated performance specifications. No other MFC supplier offers this same commitment.
Process Flow Products
Process Flow Products are available in 316L or Aluminum (180 Series only) and feature a 32µ inch Ra surface finish. Process Flow MFCs are ideally suited for general purpose fluid delivery applications where high purity gas path is not required.
Process Flow Products:
- 122 Series - Control Valves
- 180 Series - Standard Flow Application
- 7300 Series - Standard Flow Applications
- 8100 Series - Standard Flow Applications
- 8130 Series - Setpoint Pressure Control
High Purity (HP) Gas Flow Products
HP Products feature 16 and 10µ inch Ra surface finish options. HP products are available in 316L stainless steel for standard deposition, coating, or fluid delivery applications or SEMI F20-compliant for aggressive surface chemistries (i.e., reactive ion etch).
High Purity Flow Products:
- 132 Series - Control Valves
- 1630 Series - Setpoint Pressure Control
- 1660 Series - Standard Flow Applications
- 1660 SDS Series - Safe Delivery Source
- 1661e Series - Standard Flow Applications
- 3160 Series - High Flow Applications
- 7360 Series - Standard Flow Applications
Ultra High Purity (UHP) Gas Flow Products
UHP Products feature a 4µ inch Ra surface finish for fastest dry down, purging, and low incidence of particle nucleation. In addition, UHP Products utilize SEMI F20-compliant stainless steel for the widest chemical compatibility.
Ultra High Purity Flow Products:
- 125 Series - Integrated Flow Controller
- 8160 Series - Standard Flow Applications
- 8160 SDS Series - Safe Delivery Source
- 8260 Series - Standard Flow Applications
- 8560 Series - Standard Flow Applications
- 8560 SDS Series - Safe Delivery Source
- 9500 Series - High Temperature Application
- 9860 Series - High Temperature Applications
TECHNOLOGIES
Celerity proprietary technologies for gas process modules.
MultiFlo® technology is an N2-calibrated, gas and range configurable flow control solution.
PTI technology utilizes a dual sensor controller to compensate for yield-impacting pressure transients.
Step® technology enables fast setpoint control response through an optimize sensor drive.