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Celerity Files Suit Against Ultra Clean

MILPITAS, CA, September 19, 2005 - Celerity, Inc. has filed a patent infringement lawsuit against Ultra Clean Holdings, Inc. (NASDAQ: UCTT), and its subsidiary Ultra Clean Technology Systems and Service, Inc., Menlo Park, CA.

The suit, filed in federal court in Delaware, alleges Ultra Clean has infringed seven patents by developing and marketing products that use Celerity's fluid distribution technology.

"Celerity has invested significant financial and personnel resources to develop our fluid distribution systems, including manifold blocks, gas panels and systems that best serve our customer's needs." said Joe Foster, senior vice president of technology and marketing at Celerity. "We will vigorously defend our technology portfolio against unauthorized use."

Celerity's patented fluid distribution technology is used in semiconductor manufacturing and other related industries requiring high precision process control.

About Celerity

Celerity is a leader in the design and production of high-performance gas and chemical delivery process modules that are integral to the equipment used in manufacturing semiconductors, flat panel displays, and related products. For additional information, please visit www.celerity.net.