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Celerity Introduces a New Method of Concentration Management

MILPITAS, Calif., July 7, 2004 - Celerity Group, Inc. today announced the introduction of the ConSensor™ Concentration Management System. Embedded with Celerity's Spectrym™ technology, it is designed to provide a reliable, cost effective means for monitoring and controlling the concentrations of oxidizers in CMP slurry blends. This new product features a number of benefits that are designed to enhance performance and reduce costs.

The ConSensor™ monitors and maintains key chemical ingredients, vital to a process function, by using optical measuring techniques and proprietary algorithms that are based on Celerity's Spectrym™ technology. The system automatically qualifies blends, ensures consistent batch-to-batch reproducibility, and maintains consistent day tank contents. The ConSensor™ is most beneficial in Copper and Tungsten CMP processes by measuring ranges between 1-8% by weight and maintaining the setpoint at better than ± 0.05% weight.

ConSensor™ is an in-line device that requires no reagents for chemical endpoint detection and reduces waste to minute slurry volumes and DI water. Its modular, no moving part design and in-line metrology contributes to ease of maintenance.

"To meet the demands required for next generation production, environments demand speed, consistency and precision. The ConSensor™ is one of the many improvements that we believe will help shape tomorrow's fab operation" said Jeff Wilmer, Senior Director of Technology at Celerity.

About Celerity

Celerity is a leader in the design and production of high-performance gas and chemical delivery process modules that are integral to the equipment used in manufacturing semiconductors, flat panel displays, and related products. For additional information, please visit www.celerity.net.