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Celerity Announces Exclusive Partnership with DAS for Manufacturing , Sales, and Support of Abatement Equipment in North America

MILPITAS, Calif., July 22, 2002 - Celerity Group, Inc. today announced the formation of an agreement with DAS Dunnschicht Anlagen Systeme GmbH, to market abatement equipment to the semiconductor industry in North America. Under this exclusive agreement, Celerity will manufacture DAS abatement equipment and will provide sales, service, and support to semiconductor original equipment manufacturers and integrated circuit manufacturers throughout North America.

"Our partnership with DAS offers tremendous benefits for both companies", said Dan Rubin, president and COO of Celerity. "Our exclusive arrangement allows Celerity to better serve our customers by adding abatement solutions to our product offering, while offering improved market penetration for DAS. Further, our local manufacturing and service centers will enable us to reduce cycle time and offer reliable 24/7 service and support for customers throughout North America."

Celerity will initially be manufacturing the abatement equipment at one of its main outsource manufacturing facilities in Austin, Texas. In the United States, Celerity also has manufacturing facilities in Milpitas, California, Yorba Linda, California, and in Sherwood, Oregon.

"We are very excited about the Celerity partnership", said Horst Reichardt, president of DAS. "It will enable us to better serve the North American market and further position us as a global leader in abatement solutions to the semiconductor industry."

Celerity is a leading provider of gas and chemical delivery process modules and critical instruments to the semiconductor industry and related industries requiring high precision and flow control. Celerity, formerly known as Kinetics Fluid Systems, is a division of Kinetics Group, Inc. For more information, please visit www.celerity.net.