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Kinetics Introduces the MultiFlo(TM) Inventory Solution to Reduce Inventory and Increase the Ability to Respond to Configuration Changes and Tool Down Emergencies

SANTA CLARA, Calif., July 11, 2000 - Kinetics Group, Inc., a global leader in Mass Flow Controllers, today introduced the MultiFlo Inventory Solution as an accessory to the Unit Instruments(TM) product line. The MultiFlo Inventory Solution provides a simple and easy approach to use digital Unit MultiFlo MFCs for inventory reduction: fabs and OEMs alike can now reduce their MFC inventory by up to 90%, while increasing their ability to respond to configuration changes and tool down emergencies. The MultiFlo Inventory Solution allows easy programming of digital MultiFlo MFCs with active gas and range configuration and extends their capabilities to an unlimited number of gases and ranges.

The MultiFlo Inventory Solution is a set of 10 standard MultiFlo MFCs or Standard MultiFlo Configurations, (SCs) combined with the MultiFlo Configurator Software Kit to program the SCs for the desired gas and range configuration and to produce a label with the active gas and range. The MultiFlo Configurator software runs on PCs with any Windows 95/98 or NT 4.0 and above. A printer and blank label stock, selected to meet the environmental requirements of gas boxes, are also provided.

The SCs have been defined so that 10 SCs cover most gases and ranges from 10 sccm to 30 slm, (N2 equivalent) with the same performance as digital MultiFlo MFCs. SCs are calibrated with all the necessary surrogate gases to achieve this level of performance. SCs are drop-in replacements for analog and digital MFCs. Over 8000 MultiFlo MFCs have been operating in fabs for several years on tools designed for analog MFCs and have demonstrated that MultiFlo MFCs are plug-and-play devices with analog MFCs.

Kinetics is the largest U.S. manufacturer of mass flow controllers for the semiconductor and industrial markets. Mass flow controllers (MFCs) regulate the flow of gas within semiconductor wafer manufacturing tools and other manufacturing equipment. Today, the Unit Instruments product line incorporates MultiFloa�N digital control, FloGuarda�N pressure compensation technology, DeviceNet communication and a host of other cutting-edge solutions.

Unsurpassed accuracy and repeatability, fast response, superior flow stability, robustness and best reliability with the highest Mean Time Between Failures (MTBF) make Unit Instruments products the clear choice for the industry's most demanding applications. All of Kinetics facilities involved in the manufacturing and servicing of Unit Instruments MFCs are ISO-9000 certified.

Kinetics is the world�fs largest provider of critical process infrastructure, uniquely positioned to meet its customers�f needs for integrating new process manufacturing technologies and expanding capacity in their facilities. The company designs, manufactures, and facilitates chemical, slurry, gas and water process systems that are critical to the semiconductor, biotechnology, and pharmaceutical industries. Kinetics is an agile, global organization 7300 employees strong, with strategic expansion plans to leverage its 27 years of experience and innovation into new markets around the globe.