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Kinetics Introduces New Floguard(TM) Mass Flow Controller With DeviceNet(TM) Communication For 300mm Tools To Reduce Gas System Cost And Size

SANTA CLARA, Calif., July 11, 2000 - Kinetics Group, Inc., a global leader in Mass Flow Controllers, today introduced a new FloGuard MFC with DeviceNet network protocol communication. DeviceNet is the communication protocol of choice for 300mm wafer manufacturing tools. FloGuard MFCs combined with DeviceNet communication allow wafer equipment manufacturers to design processes with superior performance at the lowest cost. In addition, FloGuard MFCs reduce the size of the gas panel, which gives more flexibility to the tool designers to meet the footprint requirement for 300mm tools and increases the productivity per square foot of fab space for device manufacturers.

DeviceNet communication protocol has been chosen by tool designers for 300mm processes because of its performance, low cost, standardization, and the availability of interchangeable components. DeviceNet is an open network standard and the Open DeviceNet Vendor Association, Inc. (ODVA) maintains the specifications. FloGuard MFCs are ODVA compliant.

FloGuard MFCs combine a new patent-pending pressure compensation technology with the well-proven thermal sensors used in Kineticsf Unit Instruments top-of-the-line MFCs to provide unequaled flow stability. The technique eliminates the need for pressure regulators typically found in gas systems upstream of MFCs to buffer pressure fluctuations that cause flow oscillations. This breakthrough has the potential to dramatically reduce the size of gas systems, by up to 50%, as installing a regulator to handle pressure surges typically necessitates an additional pressure transducer/gauge and a filter to clean up particle shedding. This results in a simplified, smaller, reduced cost gas system with improved performance. Other benefits of FloGuard MFCs include reduced maintenance, reduced inventory, reduced downtime and ease of diagnostic of the gas system.

The principle of operations of a FloGuard MFC is based on the conditions of "choked flow" where the flow is proportional to the pressure of the gas feeding a sonic orifice. The control valve acts as a pressure regulator to control the pressure behind the orifice. The thermal mass flow sensor provides flow indication, and digital control provides fast response feedback loop for superior flow regulation. FloGuard MFCs are based on Unit Instrumentsf top of the line MFCs, using digital control and providing all the benefits of the MultiFlo(TM) digital option with a predicted MTBF of 500,000 hours. It is based on thermal mass flow control technology, providing the highest accuracy (+ 1% setpoint), with the advantage of being immune to upstream and downstream pressure surges. FloGuard MFCs are drop-in replacements for conventional MFCs.

Kinetics is the largest U.S. manufacturer of mass flow controllers for the semiconductor and industrial markets. Mass flow controllers (MFCs) regulate the flow of gas within semiconductor wafer manufacturing tools and other manufacturing equipment. Today, Unit Instruments product line incorporates MultiFloaN digital control, FloGuardaN pressure compensation technology, DeviceNet communication and a host of other cutting-edge solutions. Unsurpassed accuracy and repeatability, fast response, superior flow stability, robustness and best reliability with the highest Mean Time Between Failures (MTBF) make Unit Instruments products the clear choice for the industry's most demanding applications.

Kinetics is the world's largest provider of critical process infrastructure, uniquely positioned to meet its customersf needs for integrating new process manufacturing technologies and expanding capacity in their facilities. The company designs, manufactures, and facilitates chemical, slurry, gas and water process systems that are critical to the semiconductor, biotechnology, and pharmaceutical industries. Kinetics is an agile, global organization 7300 employees strong, with strategic expansion plans to leverage its 27 years of experience and innovation into new markets around the globe.